USITC institutes Nikon patent probe
ASML hits back at Nikon in patent clash
Panama7 / iStockphoto.com
Japan-based Nikon has initiated a series of legal actions against ASML, a manufacturer of semiconductor lithography systems, in the Netherlands, Germany and Japan.
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Nikon, ASML, Carl Zeiss, lithography, patent, patent infringement, semiconductor, litigation, cross-licence agreement